In-plane anisotropy and stress detection of films deposited by RC technique

Abstract

A Novel Rotating Cryostat (RC) vacuum system originally designed to fabricate organic layers has,been developed in order to prepare magnetic materials for specific applications such as sensors. The RC sputtering system has a rotating drum (substrate holder) and the possibility of using multi-port deposition sources. The source material sputtered by a do magnetron, which was positioned one of the ports around the RC, was an iron disk (25 mm diameter, 0.8 mm thick, 99.8% pure). Results show that films have exhibited isotropic and anisotropic magnetisation at various running conditions of the RC using a Magneto-Optic Loop Plotter (MOKE) and a Vibrating Sample Magnetometer (VSM). Estimation of magnetic anisotropy confirms in-plane anisotropy in the films. Moreover, when these films are subjected to a bending stress within the VSM, they show chances in their hysteresis loops. These findings indicate a possible future for this technique to produce sensing devices for stress detection.