Magnetic properties of dc magnetron sputtered and evaporated amorphous films

Abstract

Compositions. of Fe81B13.5Si3.5C2, Fe67Co18Si1B14 and Fe5.85Co72.15Mo2B15Si5 were deposited on to rigid and flexible substrates for the first time using a dc sputtering source as part of a novel Rotating Cryostat (RC). The films sputtered on silicon and glass show only isotropic magnetisation, whereas those sputtered on a polyimide (Kapton(TM)) substrate exhibited either isotropic or anisotropic magnetisation depending upon composition. Similar findings were obtained for equivalent evaporated films.