Monte Carlo calculations of electrons in aluminum

Abstract

The interaction of keV electrons with solids was studied by considering electrons transmitted through thin films as well as electrons backscattering from semi-infinite solid targets. The elastic scattering cross-section was obtained from the Rutherford differential cross-section. The numerical coefficient in the atomic screening parameter and spin-relativistic correction factor were taken as variables. The inelastic scattering model was employed to simulate the energy loss using Gryzinski's semi-empirical expression and Gryzinski and Liljequist models to calculate the total inelastic scattering cross-section. The simulation results were found to be in good agreement with other simulations and experiments.